http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-112010005555-T5
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c186e9ae8cafab5df5c8d80cfa7b0fa1 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02024 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2010-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8547b5de250b0505a4158fc1b9523776 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3d2a65f1516660bb894eb81a667aa0fe http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c4e0623a11f80c164bb8f879d0840692 |
| publicationDate | 2013-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DE-112010005555-T5 |
| titleOfInvention | Polishing agent, compound semiconductor manufacturing method and semiconductor device manufacturing method |
| abstract | There is provided a polishing agent, a compound semiconductor manufacturing method and a semiconductor device manufacturing method using the agent, whereby the surface quality of compound semiconductor substrates can be favorably maintained and, moreover, high polishing rates can be maintained. The polishing agent is a polish for Ga α In (1-α) As β P (1-β) composite semiconductors (wherein 0 ≤ α ≤ 1; 0 ≤ β ≤ 1) and contains an alkali metal carbonate, an organic alkali metal salt, a chlorine-based oxidizer and an alkali metal phosphate, wherein the sum of the concentrations of the alkali metal carbonate and the organic alkali metal salt is between 0.01 mol / liter and 0.02 mol / liter inclusive. The compound semiconductor manufacturing method comprises a step of preparing a Ga α In (1-α) As β P (1-β) compound semiconductor (where 0 ≤ α ≤ 1; 0 ≤ β ≤ 1) and a step of polishing the surface of Compound semiconductor using the above-described polishing agent. |
| priorityDate | 2010-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 60.