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filingDate 2008-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2013-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber DE-112008004068-T5
titleOfInvention A hardmask composition having improved storage stability for forming a resist underlayer film
abstract Disclosed is a hardmask composition for forming a resist underlayer film. The hardmask composition comprises (A) an organosilane polymer and (B) at least one stabilizer. The hardmask composition is very stable during storage and, thanks to its excellent hardmask properties, enables the transfer of a good pattern to a layer of material.
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