http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-112006001203-B4
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_33c922e05f6133b7d72dbb849d77487d |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-312 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02288 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02118 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D11-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00 |
| filingDate | 2006-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_946384247d71e5af9c809063ac1273a4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_18eb4ec1f305bcaf96f6003484490d98 |
| publicationDate | 2013-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DE-112006001203-B4 |
| titleOfInvention | Method for forming a high-resolution pattern |
| abstract | A method of forming a pattern comprising the steps of: (a) providing a substrate having a sacrificial layer of a first material partially or wholly formed on the substrate; (b) forming pattern grooves that are free of the first material and have a line width of a first resolution on the sacrificial layer using the irradiation of a focused energy beam as the first means; (c) filling the pattern grooves with a second material using an ink jet as a second means in a second resolution that is less than the line width of the pattern grooves formed in step (b); and (d) removing by irradiation the first material present in the remaining sacrificial layer, the first material having a threshold fluence lower than the threshold fluence of the second material removing the first material in an incident fluence in step (d) from the swelling fluence of the first material to the threshold fluence of the ... |
| priorityDate | 2005-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 164.