Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_51d028c578ae85cb937b5b34a5129fbc |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-249967 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-1089 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-249953 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24917 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24926 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76868 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76877 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76873 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-288 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76843 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76874 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76846 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
filingDate |
2004-09-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4416d0b240bde5b7a231017e1eb67ad9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b29747ff38c6a4d2c31f541cc9e6c191 |
publicationDate |
2006-08-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
DE-112004001684-T5 |
titleOfInvention |
Seed repair deep vias (via) using electroless plating chemistry |
abstract |
A method of forming a seed layer comprising: Forming a discontinuous metal layer within a recess in a substrate; Activating the non-continuous metal layer and at least one non-deposited area within the recess; and Electroless deposition of a seed layer on the discontinuous metal layer and on the at least one non-deposited region within the recess. |
priorityDate |
2003-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |