http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-10361792-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ccffa302edf741b47bcb6d0880741773 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-0625 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-06 |
| filingDate | 2003-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e10f10bc58b9e31031ea15c3b4bfda6c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0459059cec9f88cc7e73d386ed0e1ba3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d776b9760d51d3ead25632a29a8f90af |
| publicationDate | 2004-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DE-10361792-A1 |
| titleOfInvention | Device for measuring the layer thickness and the curvature of at least partially reflecting surfaces of layers |
| abstract | The measurement of the sample curvature during the layer deposition enables a precise control of the tension of layer systems. However, measurement is often difficult due to poor accessibility using optical methods. In addition, the deposition rate of the layer is important in order to be able to control the deposition parameters and to be able to calculate the tension precisely. The invention enables the measurement of the surface curvature, the layer thickness and, if necessary, also the surface temperature with optical methods even with narrow geometries of the coating system. This is achieved by illuminating the layer surface with at least two nearly parallel light beams, using a beam splitter to separate the incident and reflected light beams from the layer surface, and measuring the distance between at least two light beams reflected on the layer surface with a line or area detector and the determination of the layer thickness from the temporal behavior of the reflected intensity of the light points or the total intensity. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2546600-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007015616-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/NL-1034928-C http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017148608-A1 |
| priorityDate | 2003-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.