| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1a492183be65153abfa7dec00d51c816 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D1-345
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-322 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D1-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D11-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D9-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K23-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 |
| filingDate |
2003-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-10-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aca211af9f781e86015cff02daf209cc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_48e6069d2ef2b0ddee606e80d42f689c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_60ea28a01d4e427f5610acd2c434d8f1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5e551b94a4b3c565210d8a0ade52ef7e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9f323990ae6a6105016defb512b2bf05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c4a9821905a4e646ca8b10e14ad88dce |
| publicationDate |
2016-10-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-10356178-B4 |
| titleOfInvention |
Cleaning solution for photoresist and its use |
| abstract |
A cleaning solution for photoresist patterns, comprising: H 2 O as a solvent; a compound represented by the following formula 1 as a surface-active agent; and an alcohol in which R is C 2 -C 20 alkyl or C 6 -C 25 alkylaryl; each of x, y and z is an integer ranging from 0 to 10; a is 2 or 3; and b is an integer ranging from 2 to 50. formula 1 |
| priorityDate |
2003-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |