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filingDate 2003-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c193c08403b3f27bc512ea7c70cbd77b
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publicationDate 2005-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber DE-10352641-A1
titleOfInvention Charge trapping memory cell and manufacturing process
abstract Anfor batch trappingnprovided memory layer sequence with a memory area (8) betweennBoundary layers (7, 9) are formed on overhanging flanks (6) of a gate electroden(5), wherein the memory area (8) at the lower gate edgenin the form of a veinnone between the respective source / drain region (2) and thenChannel region (3) existing interface (10) extends.
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Total number of triples: 25.