http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-10300577-B4
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a2bcaf91101a370a3d64e3190366357f |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76283 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-088 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66325 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-331 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-762 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-088 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78 |
| filingDate | 2003-01-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2012-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7e84b7aee69e30d7fdd0947e317306f8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_54546ef70cd59db0b80ecc02f7800f68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b85ab5466a8bc9c11e3d8ca0906be6e3 |
| publicationDate | 2012-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DE-10300577-B4 |
| titleOfInvention | Semiconductor device with vertical power device comprising a separation trench and method for its preparation |
| abstract | Method for producing a semiconductor component which has a first vertical power component (5) and at least one lateral, active component (6) and / or at least one second vertical power component with the steps: Providing a silicon substrate (1) having a front and a rear side, Etching at least one trench (2) which completely surrounds at least a partial area of the front side, into the silicon substrate (1), - filling the at least one trench (2) with an insulation (4) which contains at least one dielectric or is a dielectric, - Performing process steps on the front side of the silicon substrate (1) for producing the first vertical power device (5) and the at least one lateral, active device (6) and / or the at least one second vertical power device, so that both the first power device (5) as well as the at least one lateral active component (6) and / or the at least one second vertical power component concentrically or eccentrically enclose a common reference point and in each case by the at least one ... |
| priorityDate | 2003-01-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.