http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-10258787-B4
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1a492183be65153abfa7dec00d51c816 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B69-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-40114 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B41-30 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-423 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-762 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-115 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8247 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-792 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-788 |
| filingDate | 2002-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2007-10-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8d8f7a1d5c304b258414798d8abdce9c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3f45b873377dc0dcc55360afa64ce9b7 |
| publicationDate | 2007-10-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DE-10258787-B4 |
| titleOfInvention | Method for producing a self-aligned floating gate in a flash memory cell |
| abstract | A method of fabricating a self-aligned, floating gate in a flash memory cell, comprising the steps of: - forming a trench (16) in a semiconductor substrate (10); - forming a trench isolation film (24) having a first protrusion in the trench (16), the first protrusion having a first width (W1) and a first height (H1); - Producing a cover layer (26) on the entire structure; Forming a second, smaller protrusion in the trench isolation film (24) by etching the cover layer (26) and a portion of the first protrusion, the second protrusion having a second width (W2) and a second height (H2), the second width (W2) is smaller than the first width (W1) and the second height (H2) is smaller than the first height (H1); and - Producing a floating gate (30), which is isolated by the second projection of the Grabenisolierfilms (24). |
| priorityDate | 2001-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 31.