| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_54da2c55acc520080b9f194c7a839f23 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01079
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0657
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-09701
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-0118 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-059
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-1078 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-06 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-50 |
| filingDate |
2002-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8434fa30aaa6699f843f665770602f75 |
| publicationDate |
2004-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-10253163-A1 |
| titleOfInvention |
Device with hermetic encapsulation and wafer-scale manufacturing process |
| abstract |
A component with a sandwich-like structure is described in which the chip carrying the component structures is glued to a frame structure and a diffusion-tight cover in such a way that the component structures are arranged inside the structure and preferably in a cavity. The layer transitions of the structure are protected on the side edges with a metallization. Vias through the cover connect contacts on the underside of the cover to the connection metallizations of the component structures on the chip. The plated-through holes are sealed with an underside metallization. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102005006833-B4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9197192-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7781343-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11244876-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-112012001150-B4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102006056598-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1976118-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102006056598-B4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1976118-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11538726-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9271400-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1897122-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1897122-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2501039-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102007001518-B4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-112011105113-B4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102007001518-A1 |
| priorityDate |
2002-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |