| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a2bcaf91101a370a3d64e3190366357f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32596
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3266
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32724 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-513
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 |
| filingDate |
2002-10-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_90a6b2bb606f4ba9179e2cad15e244f7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1b43b780d91d6cfeb8032c2417f28ed8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b503fff0a517d0db4d734b4328b387a1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ab2434f64862a2af3f52e9ef6f1bc0f2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c329a1974530e45b745f7857e241053c |
| publicationDate |
2004-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-10247888-A1 |
| titleOfInvention |
Device for generating plasmas by high-frequency discharges |
| abstract |
The invention relates to a device for generating plasmas by high-frequency discharges for plasma and ion treatment or for the deposition of layers by plasma polymerization onto flat plate-shaped or band-shaped materials or other shaped substrates in vacuum systems with the aid of a high-frequency-fed plasma containing at least two electrodes, between which a plasma discharge can be maintained, an electrode being designed as a hollow electrode 1, a grounded flat or curved surface forming a counter electrode 16 and the side of the hollow electrode 1 facing away from the plasma discharge being enclosed by a shielding electrode 3, the space between the hollow electrode 1 and Shielding electrode 3 is designed to be pressure decoupled from the vacuum and a pressure which is higher than the vacuum can be set in this space. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102006020290-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102006020290-B4 |
| priorityDate |
2002-10-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |