| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36f8253f3d0d59bcd9259217d4385d10 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02356
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-409
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0234
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31691
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02197 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-314 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 |
| filingDate |
2002-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_995bb92a12baba91acc4a9beaa94913d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e4be9569ff5a3c6c1325338aa72a3898
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ced9fdb42d9679da39cb8c4b8ab4d465
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa1b1424b565a6c446b026c9c8211b39 |
| publicationDate |
2003-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-10243468-A1 |
| titleOfInvention |
Process for crystallizing metal oxide dielectric layers at low temperature |
| abstract |
A method of forming a crystalline dielectric layer deposits an amorphous metal oxide dielectric layer on a surface (10). The amorphous metal oxide dielectric layer is treated with a plasma at a temperature of at most 400 ° C. (12) in order to form a crystalline layer. |
| priorityDate |
2001-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |