| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c0f7e3fa7ac7395dee357c166ef30e65
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a2bcaf91101a370a3d64e3190366357f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J4-002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J19-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J4-001
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B11-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B11-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J4-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-12 |
| filingDate |
2002-08-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_801311a56e99bfdc33a6da24e0e56f0f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_581e3021862c276de0b5b4c77a4344ba
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ec652938358d9aaf6617269e051faa3a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_495bd5de03dee49e0c9326ed3b034c00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ee071a17e0b34515b13e9a9067cce972
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a7f51390751c644b829be20fb6746083 |
| publicationDate |
2004-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-10239083-A1 |
| titleOfInvention |
Device for supplying a process chamber with fluid media |
| abstract |
In a device for supplying a process chamber with fluid media with at least one supply line (17) which has a supply opening (18) and with the supply opening (18) associated with sealing means (15, 19) for loading the process chamber and for removing the manufactured A high assembly effort is required from this material. Fast and uncomplicated loading of the process chamber or removal of the material produced therefrom is made possible by clamping means (30, 31) for clamping the supply line (17) onto a receptacle (15) of the process chamber (10) assigned to the supply opening (18). |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2968779-A4 |
| priorityDate |
2002-08-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |