http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-10228338-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36f8253f3d0d59bcd9259217d4385d10 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0395 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate | 2002-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7f9d76549ee448b7df8679effef0f40f |
| publicationDate | 2004-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DE-10228338-A1 |
| titleOfInvention | Production of transparent fluorine-containing resist polymers in photoresists with reaction anchors for chemical amplification of resist structures by radical terpolymerization with acrylates, methacrylates and butenol derivatives |
| abstract | The invention relates to a photoresist which contains a polymer which is obtained by polymerizing a comonomer mixture which comprises at least a first comonomer which has an acid-labile group, a second comonomer which has an anchor group and a third comonomer which is selected from Derivatives of acrylic acid, methacrylic acid and ethers of 3-buten-1-ol. |
| priorityDate | 2002-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 73.