| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3b3efed64b7205e9056e52f7a88a5350 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-106 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F212-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2002-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ecbc67e122462acc372093cc6d4c232e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0f3187f2c5aec73d810ebc6ddf0cb3d9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_23b3731c64241a8b7b5d0d4664450c01
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a6ea3591c72aaeb6232bf076025a54a0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_06d240aaa44c54a9ecd924b0309db955 |
| publicationDate |
2002-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-10213523-A1 |
| titleOfInvention |
Chemically reinforcing, positive-working residual mass |
| abstract |
A chemically amplifying positive resist composition which enables a resist pattern free of deformation in a sidewall thereof and excellent in uniformity and excellent in sensitivity as well as in resolution is provided, and the chemically amplifying positive-working resist composition comprises a resin which has a polymerization unit derived from p-hydroxystyrene and a polymerization unit having a group which is unstable to acid, and which as such is insoluble or hardly soluble in an alkaline medium but becomes alkali-soluble after the acid unstable group was cleaved by action of the generated acid; DOLLAR A an acid generating agent; and DOLLAR A is a compound of the following formula (I): wherein R x 1 and R x 2 are each independently an alkyl group having 1 to 15 carbon atoms, an alkyl group having 1 to 8 carbon atoms having at least 3 hydrogen atoms by fluorine atoms are replaced, or an aryl radical having 6 to 10 carbon atoms. |
| priorityDate |
2001-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |