| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_aa0f2776bcc27d5099aa97f3212e1681 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D11-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B7-228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D13-147 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D13-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B7-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D11-00 |
| filingDate |
2002-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0e3f803d7c3dcd783185f5e32b39f83c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c21ae70a321e77b5d76cc2480fe00f7a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_adf768baaedb7130bf2046067ff83edc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6dcda30b8aaf3d4ced10a404c9c4332f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d828f37ef65cab30778e199bb5cb0ee |
| publicationDate |
2002-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-10211342-A1 |
| titleOfInvention |
Polishing tool and method and apparatus using the same |
| abstract |
A polishing tool which comprises a support member and polishing means or devices which are fixed to the support member. The polishing agents are composed of a felt which has a density of 0.20 g / cm · 3 · or more and a hardness of 30 or more, and abrasive grains or abrasive grains which are distributed in the felt. A polishing method and device require the polishing means to be pressed or pressed against the surface of a workpiece to be polished, while the workpiece is rotated and the polishing tool is also rotated. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-101885164-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3334561-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7329174-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1764189-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3421180-A1 |
| priorityDate |
2001-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |