| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a2bcaf91101a370a3d64e3190366357f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0605 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-02 |
| filingDate |
2002-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_66f8c3eb3f81ee1385b3adfb33268929
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1304e7597b7313b2ebe0ee75c1a0ef4c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7073b6da9c99752cfd46d5ac69bf2005 |
| publicationDate |
2003-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-10203730-A1 |
| titleOfInvention |
Process for the deposition of metal-free carbon layers |
| abstract |
A method for the deposition of metal-free amorphous hydrogen-containing carbon layers works with the sputtering of targets on substrates. DOLLAR A A pure carbon target, in particular a graphite target, is used and biased with a negative DC voltage. The substrate is also preferably supplied with direct current. It is preferred to work in the unbalanced magnetron mode. This enables the production of metal-free DLC layers with high wear and hardness values. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102005050358-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7905991-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102006057484-B4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9611543-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-202006007420-U1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102005050358-B4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102006057484-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102004041234-A1 |
| priorityDate |
2002-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |