| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36333273e27f0db23ddddbf80ba79ba7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-585
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-564
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-481
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-528
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate |
2022-01-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd4e4d49db443c417a39cb1586209936
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e2169ae03450dcc6ac74f6e81d60cbb8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_61bd8ef6efe577821dd12964f43a1d46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1054cd5f6f2660eb70d312ee9128975c |
| publicationDate |
2022-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-102022100366-A1 |
| titleOfInvention |
DEVICES WITH SILICON FEEDTHROUGHS, PROTECTIVE RINGS AND THEIR PROCESSES OF MANUFACTURE |
| abstract |
A semiconductor product comprising a semiconductor substrate, a BEOL wiring portion on the semiconductor substrate, a silicon feedthrough, and a guard ring. The semiconductor substrate is formed from a semiconductor material. The BEOL wiring section has multiple wiring layers with electrically conductive wiring and electrically insulating material. The silicon via provides a conductive path through the BEOL wiring portion and the semiconductor substrate. The guard ring surrounds the silicon via in the BEOL wiring section and, in some embodiments, in the semiconductor substrate. |
| priorityDate |
2021-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |