| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a2bcaf91101a370a3d64e3190366357f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-0118
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-036
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-032 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00357
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00317 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C3-00 |
| filingDate |
2021-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_af6df2054132cb695824de2707a68102
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e2df6c6414b417dd1bffa4d312ef661f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e556a8249005a03ae006ace5a804b072
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_009f0995f377a9c96c7a186e0dfb8db7 |
| publicationDate |
2022-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-102021201151-A1 |
| titleOfInvention |
MEMS package and method for encapsulating a MEMS structure |
| abstract |
A method for encapsulating a MEMS structure in a stacked structure includes providing a functional wafer structure that at least partially includes the MEMS structure. The method includes arranging the functional wafer structure and a glass wafer in the stack structure and along a stacking direction to one another and is carried out such that a cavity in which at least part of the MEMS structure is arranged is closed on one side along the stacking direction with the glass wafer and such that a spacer structure is placed between the part of the MEMS structure and the glass wafer in the stacking structure to provide a space between the part of the MEMS structure and the glass wafer along the stacking direction such that the spacer structure encloses part of the cavity . |
| priorityDate |
2021-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |