| abstract |
It becomes a test system for testing a workpiece for a property by radiating microwaves onto the workpiece and also by radiating a laser beam to an irradiation position of the microwaves, by receiving microwaves reflected at the irradiation position where the workpiece has a reflectivity that is increased by carriers generated via photoexcitation, and disclosed by measuring a lifetime of the carriers. The test system includes a chuck table for holding the workpiece, a microwave irradiation unit that emits the microwaves onto the workpiece held on the chuck table, a microwave receiving unit that receives microwaves reflected by the workpiece, and a laser beam irradiation unit that emits the laser beam to the irradiation position which the microwaves have been emitted. |