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filingDate 2020-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_641271c29858c8ca6f63d5157d045820
publicationDate 2022-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber DE-102020131016-A1
titleOfInvention MULTI-GATE DEVICE STRUCTURE
abstract A semiconductor device according to the present invention includes a first transistor and a second transistor. The first transistor includes: first channel portions between first and second source/drain elements; a first gate structure enclosing the first channel parts; a first source/drain contact disposed over the first source/drain element; and a first top gate spacer disposed between the first gate structure and the first source/drain contact. The second transistor includes: second channel portions between third and fourth source/drain elements; a second gate structure enclosing the second channel parts; a second source/drain contact disposed over the third source/drain element; and a second top gate spacer disposed between the second gate structure and the second source/drain contact. A distance between the second gate spacer and the second source/drain contact is larger than a distance between the first gate spacer and the first source/drain contact.
priorityDate 2020-08-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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