| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_733f9f206a30eb241a0e7ece400747f1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a2bcaf91101a370a3d64e3190366357f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L33-007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-2003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7786 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0254
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02521
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-201
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-165
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02505
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02439
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02458 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-778
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-15 |
| filingDate |
2019-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3d924b27d1cd421f52fbe152c876c922
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1f6fcf97322d0c4e8581f105cd45fe23
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_83ddd34e44f3533a9df07fb14505f8b2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ba5f759f0109d3d657539797aee3e907
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3ace69faf56a1e8a438108e464130cee |
| publicationDate |
2021-03-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-102019212821-A1 |
| titleOfInvention |
Method and device for the production of a layer, the substrate provided therewith and the use thereof |
| abstract |
The invention relates to a method for producing a layer on a substrate by organometallic gas phase epitaxy which contains or consists of at least one compound of the formula M 1 a M 2 1-a N, where M 1 is an element of group 13 of the Periodic Table of the Elements and M 2 stands for an element of group 3 or the group of actinides or the group of lanthanoids of the periodic table of the elements and 0.01 a <0.99 is selected, a precursor having a molar flow (n) of at least 10 -6 mol / min is passed into a reaction chamber (1) for the organometallic gas phase epitaxy, which contains or consists of M 2. Furthermore, a device for carrying out the method and a substrate coated according to this method are specified. |
| priorityDate |
2019-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |