http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102019117890-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36333273e27f0db23ddddbf80ba79ba7 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0221 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-0136 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-0109 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-032 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0207 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0181 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00142 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01K7-34 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-02 |
| filingDate | 2019-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_70d281d7c18c46bb7bec4a360d00c5ed http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_370d8b652ef3dbe8c26f08755eb8ff9a |
| publicationDate | 2020-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DE-102019117890-A1 |
| titleOfInvention | HEAT SENSOR BASED ON A MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) |
| abstract | The structure of a heat sensor based on a micro-electro-mechanical system (MEMS) and a method for producing the MEMS heat sensor are disclosed. A method of manufacturing a MEMS heat sensor includes forming first and second sensing electrodes with first and second electrode fingers on a substrate, respectively, and forming a structured layer with a rectangular cross section between a pair of the first electrode fingers. The first and second electrode fingers are formed in an interlocking configuration and suspended over the substrate. The method further includes: modifying the patterned layer to have a curved cross-section between the pair of first electrode fingers, forming a curved sensing element on the modified patterned layer to couple it to the pair of first electrodes, and removing the modified structured layer. |
| priorityDate | 2018-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 50.