| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a8ace3886ad985680695e66f92b53552 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-216
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31744
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31732
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-1534
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-1532
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-063
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-14 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3178 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-304 |
| filingDate |
2018-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a586ccceef4d3aa4c3c0c819c992e254
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e8785f01ab659200e7f77dc52316c0ca
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2dbfa9a498c5155d2ae3cd262817d807 |
| publicationDate |
2020-01-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-102018210522-A1 |
| titleOfInvention |
Method and device for examining a beam of charged particles |
| abstract |
The present invention relates to a method for examining a beam of charged particles with the following steps: generating persistent interactions of the beam with a sample in a plurality of positions of the sample relative to the beam and deriving at least one property of the beam by analyzing the spatial distribution the persistent interactions at the majority of positions. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102022002557-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102020208183-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023001403-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102021202506-A1 |
| priorityDate |
2018-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |