http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102018132236-A1
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36f8253f3d0d59bcd9259217d4385d10 |
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-26506 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0696 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66333 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-26513 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7395 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0619 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-861 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0638 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7802 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0834 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0878 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66712 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-1095 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-331 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-739 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-06 |
filingDate | 2018-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4ce03f6c2e00d638ccd6dbb19fb15f21 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ac6607e1c1229168363077a0df1f294a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ce10cfd73921f7e3960b93cd2ccba041 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f42bc5b8d6582f298e2f92dd391b0741 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cc2da4665c2b4a8a2ac2f6e14c9b4182 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8879b0a1ac5b92279f45a9e22ea5c572 |
publicationDate | 2020-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | DE-102018132236-A1 |
titleOfInvention | Power semiconductor component |
abstract | A power semiconductor component (1) comprises a semiconductor body (10) with a front side (10-1) and a rear side (10-2), the semiconductor body (10) including: a drift region (100) of a first conductivity type; a field stop region (105) of the first conductivity type, the field stop region (105) being arranged between the drift region (100) and the rear side (10-2) and having dopants of the first conductivity type with a higher dopant concentration than the drift region (100), the Field stop area (105) was created at least partially by means of an implantation of protons through the rear side (10-2); and a first conductivity type emitter setting area (106), the emitter setting area (106) being located between the field stop area (105) and the back (10-2) and having first conductivity type dopants with a higher dopant concentration than the field stop area (105). The field stop region (105) comprises, in a cross section along a vertical direction (Z), which points from the rear (10-2) to the front (10-1), a dopant concentration profile of dopants of the first conductivity type, which has a first local maximum (1051 ) and a first local minimum (1052), the first local minimum (1052) between the first local maximum (1051) and another local maximum (1053, 1055, 1057) of the dopant concentration profile of the field stop region (105) and / or between the first local maximum (1051) and a maximum of a dopant concentration profile of the emitter setting region (106), the dopant concentration at the first local maximum (1051) being at most a factor of three higher than the dopant concentration at the first local Minimum (1052), and wherein the semiconductor body (10) is or comprises a semiconductor substrate with an interstitial oxygen concentration of at least 1E17 cm -3 . |
priorityDate | 2018-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 52.