http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102017210167-A1

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filingDate 2017-06-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2018-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber DE-102017210167-A1
titleOfInvention Device and method for processing a surface
abstract The invention relates to a device (1) for processing a surface (21) of a workpiece (2) with a plasma generating device (4) and a laser beam generating device (3), which are adapted to at least a partial surface (25) of the surface (21) of the workpiece (2) to be applied with laser radiation (35) and plasma (45), wherein the laser beam generating means (3) is adapted to emit pulsed laser radiation (35) having a pulse length of less than about 100 fs or less than about 80 fs or less than about 50 fs or less than about 30 fs. Furthermore, the invention relates to a method for processing a surface (21) of a workpiece (2) with a plasma generating device (4) and a laser beam generating device (3).
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021079940-A1
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