http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102017203910-B4
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a2bcaf91101a370a3d64e3190366357f |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-455 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 |
filingDate | 2017-03-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2019-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6c75dba69a23f11d31b8dbf592f3517d |
publicationDate | 2019-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | DE-102017203910-B4 |
titleOfInvention | Process for separating lithium-containing mixed oxides |
abstract | A process for depositing lithiated mixed oxides which comprises thermal atomic layer deposition of lithium oxide and lithium hydroxide using water and a lithium precursor on a surface of a substrate (103) by passing the lithium precursor along with a purge gas onto the surface of the substrate (103) followed by water is directed onto the surface of the substrate (103), characterized in that, after the application of the lithium precursor to the substrate (103) and before the application of the water, a second precursor is applied to the surface of the substrate (103) and a purge gas after each Applying the lithium precursor, after the application of the second precursor and after the application of the water to the surface of the substrate (103) is passed. |
priorityDate | 2017-03-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 43.