| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36f8253f3d0d59bcd9259217d4385d10 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-68381
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-68377
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-6835 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02587
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02612
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-568
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02609
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-26506
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0657
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02527
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02529
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-1606
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76254
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02494
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-187
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-1608
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-165
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6835
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02658
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02447
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76251 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-331 |
| filingDate |
2016-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3e40a22f4b4093f3da529373710b4a08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d7096bc6cd141f23a16ad5efb927947
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ce10cfd73921f7e3960b93cd2ccba041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_08ec5d7d6b97f7108cbc7b3fa5478c52 |
| publicationDate |
2017-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-102016105610-A1 |
| titleOfInvention |
Semiconductor device with a graphene layer and a method for its preparation |
| abstract |
A method of fabricating a semiconductor device comprising providing a carrier wafer (110) and a silicon carbide wafer (100); bonding a first side (101) of the silicon carbide wafer (100) to the carrier wafer (110); splitting the silicon carbide wafer (100) bonded to the carrier wafer (110) into a silicon carbide layer (106) thinner than the silicon carbide wafer (100) and a remaining silicon carbide wafer (100a), the silicon carbide layer (106) remains bonded to the carrier wafer (110) during cleaving; and forming a graphene material (130) on the silicon carbide layer (106). |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111599742-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102018119634-A1 |
| priorityDate |
2016-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |