http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102015221193-B4

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filingDate 2015-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2018-05-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_36409098b4ad2a85959d1901bbf2c379
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publicationDate 2018-05-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber DE-102015221193-B4
titleOfInvention Apparatus for controlling an intensity of a transmissive portion of electromagnetic radiation incident on the apparatus and method of manufacturing the apparatus
abstract Device (100), which is designed to modulate the intensity of an optical radiation (8) of a specific wavelength range, the device (100) having the following features: a substrate (1); a membrane (11) having at least two layers (12, 13), wherein a first layer (12) has a higher electrical conductivity than a second layer (13), and wherein the second layer (13) has a higher lower yield strength and or a higher tensile strength than the first layer (12), wherein at least the first layer (12) has perforations (5) adapted to form in the membrane (11) resonators for extraordinary transmission; wherein the diaphragm (11) is switchable between a first position and a second position by changing an electrical voltage (104) between the diaphragm (11) and the substrate (1), the diaphragm (11) being in a first position in the first position Distance (106 a) to the substrate (1) is arranged, wherein the incident optical radiation (8) through the membrane (11) and the substrate (1) is transmitted, and wherein the membrane (11) in the second position in a second Distance (106b) is arranged to the substrate (1) and the incident optical radiation (8) at a transmission (9) through the substrate (1) and the membrane (11) prevents, and wherein the second distance (106b) between the Membrane (11) and the substrate (1) is zero, so that the membrane (11) contacts the substrate (1) in the second position.
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