http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102015220127-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1229111a198f86af4112ecd730b55cd9 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32559 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-035 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4418 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4409 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-24 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-035 |
| filingDate | 2015-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a646158eada3a33d238219719aa8dd0a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_01bbd2e2f9f9a32d1239af8edb524d9f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f8f258587d122abd6e889e18d85dd520 |
| publicationDate | 2017-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DE-102015220127-A1 |
| titleOfInvention | Device for insulating and sealing electrode holders in CVD reactors |
| abstract | The present invention relates to a device for insulating and sealing electrode holders in CVD reactors, comprising an electrode suitable for receiving a filament rod on an electrode holder of an electrically conductive material, which is mounted in a recess of a bottom plate, wherein between the electrode holder and bottom plate electrically insulating Ring of a material having a specific thermal conductivity at room temperature of 0.2-50 W / mK, a Mindestbiegefestigkeit greater than 120 MPa and a specific electrical resistance at room temperature greater than 10 9 Ωcm is provided, wherein at least two annular sealing elements for sealing between the electrode holder and the bottom plate are present, wherein the electrically insulating ring or the electrode holder or the bottom plate comprises at least one groove in which a first sealing element is fixed, wherein at least a second not in a groove fixed sealing element between electrically insulating ring and bottom plate or between electrically insulating ring and electrode holder is present. |
| priorityDate | 2015-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 47.