Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fd446fb0d73aa96d044fea2eaa3c8ebc |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-0205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-023 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-0853 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-20 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J5-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-0232 |
filingDate |
2015-07-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7a8ab741d4fdbf93dafb51cc98b8cac9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_add671c6e4a3204e63bb981fbd0dfb60 |
publicationDate |
2017-02-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
DE-102015214362-A1 |
titleOfInvention |
Microelectromechanical device |
abstract |
The invention relates to a microelectromechanical device comprising: a magnet (102, 202) arranged on a substrate top side (101a) of a substrate (101) and / or on a substrate rear side (101b) of the substrate (101); a microwave transmitter (503) integrated in the substrate (101); a microwave receiver (506) integrated in the substrate (101); and an absorber level (203) spaced from the substrate with a paramagnetic layer (201) facing the substrate (101) and an infrared absorber layer (107) facing away from the substrate (101). |
priorityDate |
2015-07-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |