| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_59c820ad08f8533c7440ae1d9235b168 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-407
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0878 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-41766
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-4236
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0696
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7396
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7813
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-41741
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66348
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-417
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-41708
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-1095 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-739 |
| filingDate |
2015-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8bc21e88a511d4adb8daca2d5228234d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3bb3836149b8716fe4c93510218da03a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1f3d7ce63ef482cec4f95977787ba2c3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2806d6310bd7e3ab679c4b98b896fcb8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c0c6568f76af19f4d8680746f9873643
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d1ba6464bc4cd4e3f3dc7655ab515c4f |
| publicationDate |
2017-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-102015120675-A1 |
| titleOfInvention |
Semiconductor device |
| abstract |
A semiconductor device (100) includes a semiconductor substrate (110) having between a lower surface (111) and an upper surface (112) at least a first trench (120) and a second trench (121) extending in a vertical direction, and a Contact groove (130) disposed between the first trench (120) and the second trench (121) comprises. The contact groove (130) has a longitudinal extent in a plane which is perpendicular to the vertical direction (10). The longitudinal extent of the contact groove (130) has at least partially a waveform. |
| priorityDate |
2015-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |