http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102015120252-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e1bac86042cc981d7f20429854eeddca |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-54 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-28 |
| filingDate | 2015-11-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f43fddb363dc3ac3f9f6643561d3c017 |
| publicationDate | 2017-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DE-102015120252-A1 |
| titleOfInvention | Process for the deposition of thin layers |
| abstract | The present invention relates to a method for depositing thin layers, in particular for producing multilayer layers, nanosheets, nanostructures and nanocomposites, by laser deposition from target materials onto a substrate (8) surface, wherein a) the target (5) is divided into segments (17, 18) are segmented with materials of very different physical and / or chemical properties and b) by means of controlled energetic distribution (29) of the focused laser energy over the laser beam (28) - cross section are individual segments (17, 18) of this target (5) with a respective deviating Radiation intensity is irradiated such that each target segment (17, 18) absorbs in this irradiation the amount of laser energy necessary to evaporate or desorb the target material located in the respective segment (17, 18) and c) the target (5) during the Coating process into a uniform, stepwise or variable rotation is offset. The method according to the invention is characterized in that the rotation of the target (5) is controlled by a stepping motor (30), wherein after preselected steps by means of a control and monitoring unit (29) the laser power, the pulse duration and the pulse frequency of the laser (3) is controlled, the energy density, pulse length and pulse frequency can be varied in very short periods of time. |
| priorityDate | 2015-11-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.