http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102015104127-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e2c321c5b9b5774498f194d959bdf9df |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2644 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2884 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-30 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-544 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 2015-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e65147d6929e0b936a87b3c4f4ce34e5 |
| publicationDate | 2015-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DE-102015104127-A1 |
| titleOfInvention | Positioned probe pads for prebond testing |
| abstract | An arrangement for performing prebond testing of a wafer of semiconductor devices uses probe pads positioned in wafer areas adjacent to the devices so that when prebond testing is complete and the wafer is separated into discrete elements, the electrical connection between the Prebond probe pad and the device under test is broken. The adjacent wafer areas may be "vacant" areas or another device area. After separation into discrete elements, a particular Prebond probe pad and its associated device are physically separated and electrically isolated from each other. Thus, a large probe pad is electrically connected to an associated device only while the wafer is intact, which facilitates placement of the probes during prebond testing. Once the devices are disconnected, the probe pad is no longer connected to the portion of its associated active element, which eliminates the capacity associated with maintaining an electrical connection between a probe and an active area at a common location. |
| priorityDate | 2014-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541 |
Total number of triples: 20.