http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102015004347-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7cfc365fd3d393976e118e95c8e8a65c |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2103-56 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B33-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-53 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-268 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-067 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-322 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-53 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-301 |
| filingDate | 2015-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6d871372dc9b96896beea72e1e4e6dc7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0b0b8074ddebdadad59917e36f6da8ea |
| publicationDate | 2016-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DE-102015004347-A1 |
| titleOfInvention | Generation of physical modifications by means of LASER inside a solid |
| abstract | The present invention relates to a method for producing a physical modification, in particular a lattice defect or for locally changing the strength, in a solid, in particular an ingot or a wafer. The method according to the invention comprises at least the steps: Providing the solid to be treated (2), Providing a radiation source arrangement (4) for generating at least one light beam (6), - Providing an optical system (8), wherein the optics (8) at least two deflecting elements (10, 12) for deflecting Lichtstrahlanteilen (16, 18), Generating and emitting at least one light beam (6) through the radiation source arrangement (4), - Diverting at least two mutually different light beam portions (16, 18) of the emitted light beam (6) by means of the deflection elements (10, 12), wherein the light beam portions (16, 18) are deflected such that they penetrate into the solid body (2) and wherein the mutually different deflected light beam portions (16, 18) meet in a focus (20) within the solid (2) and the physical modification (1), in particular in the form of a lattice defect, by the light ray portions (16, 18) meeting in the focus (2) ) is produced. |
| priorityDate | 2015-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 33.