| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a2bcaf91101a370a3d64e3190366357f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_527a27c04f93ca80c095b0b70b2023e6 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-0694 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-945
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66181
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-78 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-822
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-92 |
| filingDate |
2014-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fe04ddc62c13a255a35fb24cafe7637b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5d065613f15ff4ea2839f414bdb831c5 |
| publicationDate |
2016-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-102014223904-A1 |
| titleOfInvention |
Capacitor and method of making the same |
| abstract |
In a method of manufacturing a capacitor, a dielectric structure is created in a trench of a semiconductor substrate. The dielectric structure has a plurality of contiguous dielectric layers having opposing material tensions. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102019123296-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102019123296-B4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102019204503-B3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11742435-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102019118369-B4 |
| priorityDate |
2014-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |