| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a2bcaf91101a370a3d64e3190366357f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-28 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-0808
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-0235
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-0225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-024 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-101
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J5-20 |
| filingDate |
2014-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4e92db054fcd96e03312664b9cd41d56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cf48cf8bb1409bc3cc8fbe043bcc5999
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5112050c870a9369e8171dc78b25eafc |
| publicationDate |
2018-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-102014213369-B4 |
| titleOfInvention |
RADIATION DETECTOR AND METHOD FOR PRODUCING A RADIATION DETECTOR AND ARRAY OF SUCH RADIATION DETECTORS |
| abstract |
A radiation detector comprising a substrate (20) and a membrane (10) suspended above spacers (45) above the substrate (20), the spacers (45) electrically contacting a radiation sensor (50) formed in the membrane (10) the membrane (10) being thermally insulated from the substrate (20) with the membrane (10) suspended flush with the spacers (45), and wherein a cross-sectional area of the spacers (45) is less than or equal to 7 μm over an entire length 3 μm is less than or equal to 0.8 μm. |
| priorityDate |
2014-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |