http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102014100005-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5946867900a2c8ba594556a5e8f02514 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2059 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-168 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-16 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2014-01-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c0f0b133acef45311e54e1d8c83b4b26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7f9a77876745d5564a149f8151480ddf http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ed8b33f2ff9ab9115839aab5e0c307d3 |
| publicationDate | 2014-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DE-102014100005-A1 |
| titleOfInvention | Coating of resist on a substrate for ultra-high resolution lithography |
| abstract | In the method for applying a very thin coating of resist (24) to a substrate (20) is a) on the surface of the substrate (20) an initial layer (22) of resist (24) by spin-coating applied, the initial layer (22) has an initial layer thickness, b) a flexible contact material (26) is provided which is brought into full contact with the layer of resist (24) and adheres to it, and c) the contact material (26) is peeled off and In this case, it takes part of the initial layer (22) which adheres to it, on the substrate (20) remains a wear layer (28), which has a reduced thickness relative to the initial layer (22). The coated substrate (20) is then further processed in an ultra-high resolution lithography process, in particular electron beam lithography. |
| priorityDate | 2013-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.