| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_13dee5a458937040a9d2393e204888d6 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-07314
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2874
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2863
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-07307
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B21-08 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate |
2014-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eb49944a2b4c43cd7b290e2121f8c6b0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6235d00ce455317c6884184bbfc734c3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bc8a7630da198205f1bb5af9beb6f743
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_86ba8ad7e25539cdca6a594d6f606048 |
| publicationDate |
2014-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-102014008576-A1 |
| titleOfInvention |
Probe card and method of making it |
| abstract |
A probe card for electrical testing of a device under test on a chuck table containing a heat source containing a circuit base plate containing traces connected to a tester, a probe base plate containing traces to the corresponding traces, and probes and a thermal expansion adjustment member connected to the probe base plate and having a coefficient of linear expansion different from that of the probe base plate to restrict thermal expansion of the probe base plate and being a composite body with the probe base plate. In a case where the device is in the test at two measurement temperatures and the composite is at respective target temperatures, expansion change quantities of the device in the test and the composite are set to be approximately equal to temperature differences between the respective measurement temperatures and the corresponding target temperatures , |
| priorityDate |
2013-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |