http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102012214011-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a2bcaf91101a370a3d64e3190366357f |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-50 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-022441 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-02167 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24C1-00 |
| filingDate | 2012-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_42b1aeddf211c77013da2f064a30b370 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3e53d4f016a11991da7475b3587e8759 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d80efdf22e24d188134c1d9ffc952d1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_57207be2b1d4563ae13385e5d1054753 |
| publicationDate | 2014-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DE-102012214011-A1 |
| titleOfInvention | Process for the layer and regioselective removal of a metal-containing solid layer from a second solid layer with the aid of a liquid jet |
| abstract | A process is disclosed for the layer and regioselective removal of a first metal-containing solid layer from a second solid layer by means of a liquid jet. Herbei the metal-containing first solid layer is removed by mechanical action of the liquid jet and further exceeds the maximum flow rate of the liquid jet does not exceed a value of 23 m / s. Finally, the first solid layer also meets at least one of the following conditions: I. the first solid layer has at least temporarily during the impact of the liquid jet by a factor of at least 1.2 lower theoretical Vickers hardness than the second solid layer; II. The porosity of the first solid layer has a value of at least 0.1 even before the impact of the liquid jet; III. the adhesion of the first solid layer to the second solid layer is at least 50% less than the adhesion of the second solid layer to the underlying further solid layers of the substrate; IV. The average thickness of the first solid layer does not exceed a value of 15 microns. |
| priorityDate | 2012-07-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.