| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9ba165d54ce666317fde4c5799ce603e |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2001-2886
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31749
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31745
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2001-045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-206 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N23-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-286
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-317 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-28 |
| filingDate |
2012-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ad37921dc211569aa4c6688ff14d3e29 |
| publicationDate |
2013-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-102012202519-A1 |
| titleOfInvention |
Methods and apparatus for preparing microscopic samples using pulsed light |
| abstract |
The present invention relates to methods and apparatus for the preparation of microscopic samples by means of light pulses, wherein volumes are removed, which are greater than 100 microns 3 . The method comprises the following steps: - Inspecting an object by means of a scanning electron microscope (SEM) or a focused ion beam (FIB), wherein an image of the object is recorded - Specifying an area of the object to be examined - Setting a laser processing path based on the image of the object such that a sample can be prepared from the object. - Removal of a volume to be removed by laser processing along the specified laser processing path - Inspecting the object by scanning electron microscope (SEM) or focused ion beam (FIB). |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/RU-2688944-C1 |
| priorityDate |
2012-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |