http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102012105369-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a2bcaf91101a370a3d64e3190366357f |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G21K2201-067 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B5-0891 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G21K1-062 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B1-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B5-08 |
| filingDate | 2012-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a22a234a1fc218fc0fe6e46c222e8653 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_84be2f60dcb842379cea74ff0c3721ec http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_285f4c969cd0ca8e774bdf346941e076 |
| publicationDate | 2013-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DE-102012105369-A1 |
| titleOfInvention | Multilayer mirror for the EUV spectral range |
| abstract | A multilayer mirror (100) for the EUV spectral range is given, comprising A first periodic layer sequence (10) having a plurality of layer pairs (12), the layer pairs (12) each having a layer (1) of a first material and a further layer (2) of a second material, and A second periodic layer sequence (20) arranged on the first periodic layer sequence (10) and comprising at least two layer pairs (34), the layer pairs (34) of the second periodic layer sequence (20) each having a layer (3) of a third material and a further layer (4) of a fourth material, wherein The third material is different from the first and second materials, and - The third material is an oxide, a nitride, an oxynitride or a carbide. |
| priorityDate | 2012-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.