http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102012015417-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7f4d5d92a1a8e0117092105c9827a706 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B55-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-16 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B55-12 |
| filingDate | 2012-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fff125fd331600bbc2a0460619b0a02b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_91d8ce2ad5d7b92deba95ec8d15ec1cc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9bfa0d078efc95689213c0482f8ece29 |
| publicationDate | 2014-02-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DE-102012015417-A1 |
| titleOfInvention | Process for processing saw residue from the production of silicon wafers |
| abstract | The present invention relates to a method for processing sawing residues from the production of silicon wafers. The sawdust residues are composed of the coolant, usually short-chain polyethylene glycols, fine-grained silicon carbide, which is added to the coolant as a cutting agent, very fine-grained silicon saw particles and metals or metal compounds from the abrasion of the saw wire used together. These sawing residues are also referred to as slurry. The invention is based on the technical object of developing a chemical separation process of fine-grained silicon-silicon carbide mixtures, as present after the separation of polyethylene glycol in the slurry preparation, allowing the recovery of pure silicon carbide and containing the basic element contained in the mixture Silicon feeds a material use. According to the invention the technical object is achieved in that from the Wafering obtained waste slurry, the contained polyethylene glycol is separated by mechanical separation processes according to the prior art and the remaining solid, dry slurry constituents with chloromethane or dichloromethane-hydrogen gas mixtures according to the Müller-Rochow synthesis be implemented. |
| priorityDate | 2012-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 58.