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publicationDate 2012-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber DE-102012004367-A1
titleOfInvention Aluminum oxynitride coated article and process for its preparation
abstract A coated article, such. A coated cutting tool or a coated wear part comprising a substrate and a coating system on the substrate. The coating system comprises a titanium-containing coating layer and a coating layer of aluminum oxynitride on the titanium-containing coating layer. The aluminum oxynitride comprises a mixture of phases with a hexagonal aluminum nitride structure (space group: P63mc), a cubic aluminum nitride structure (space group: Fm-3m) and optionally an amorphous structure. The composition of the aluminum oxynitride coating layer comprises aluminum in an amount ranging from about 20 atomic percent to about 50 atomic percent, nitrogen ranging from about 40 atomic percent to about 70 atomic percent, and oxygen ranging from about 1 atomic percent to about 20 percent atomic percent. A method for producing the coated article comprises a step of providing a substrate and applying a coating layer of aluminum oxynitride from a gas mixture comprising nitrogen, aluminum trichloride, ammonia, carbon dioxide, hydrogen chloride, optionally carbon monoxide, optionally argon and hydrogen.
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