| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_49c7c7d947f4481d87620430416a22b3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8a94c0b21e67ac1069fd6415b05269ae |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2201-23
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2203-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2201-21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2201-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2203-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03B2201-21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03B2201-075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03B2201-07 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03B19-1453
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C3-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J65-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J61-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J61-16 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J65-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C3-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J61-30 |
| filingDate |
2011-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1ee9c6a33a62945e5ad78b016fb4da71
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fc1cc8f41322b4854d28618c6d1033a6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c860378842a2ff2034aad473e65923e5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1e49ef3e899d37ef80a3cd6d5dfbb8c1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_660c9a012af5f2ec055630e1dbbe9c5c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4c9f90c124e0b30e51556737f931fffe
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7614b9160093b1fe88c9869a7ec36bb0 |
| publicationDate |
2018-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-102011120412-B4 |
| titleOfInvention |
Excimer lamp with emission window made of quartz glass with a certain content of hydroxyl groups, hydrogen and chlorine |
| abstract |
Excimer lamp with a discharge vessel, which includes a discharge space (3) containing a xenon-containing filling gas which generates excimer molecules with an emission wavelength of 172 nm on dielectric discharge, wherein the discharge vessel consists of synthetically produced quartz glass at least in the region of an emission window (1) containing hydroxyl groups, wherein the quartz glass of the emission window (1) is produced by flame hydrolysis of a silicon-containing feedstock and direct vitrification and has an average content of hydroxyl groups of at least 900 ppm by weight, an average hydrogen content of less than 2 × 10 18 molecules / cm 3 , has an average chlorine content of less than 0.1 ppm by weight and a fictitious temperature below 1050 ° C. |
| priorityDate |
2011-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |