| abstract |
A method for supplying a process to which helium and at least one further gas, in particular nitrogen, are supplied as process gases is described. According to the helium and the further gas are provided in liquid form (S1, S2), the helium-containing exhaust gas (5) drawn off from the process (P) is at least partially subjected to a cryogenic helium enrichment (C, E1, E2), the The further gas (1) and the liquid helium (3) provided in liquid form serve at least temporarily and / or at least partially to cool the helium-containing exhaust gas (5), and the gas is removed from the cryogenic helium enrichment (C, E1, E2) Helium-rich electricity is at least temporarily and / or at least partially fed back into the process (P). |