| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6af9a57049d2d91c036d4f5ab49154cb |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76826
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76814 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-283
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate |
2011-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d320cb791c72657290d2b1826672d551
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d33265393a137ad52e0ecf31719ddf1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_436d5177e5d02706cf7b227cfe6c4f9b |
| publicationDate |
2013-03-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-102011090164-A1 |
| titleOfInvention |
Repair of damaged surface areas of sensitive small ε dielectrics of microstructure devices after a plasma treatment by in-situ treatment |
| abstract |
Damaged surface areas of low-k dielectric materials can be more efficiently repaired by avoiding saturation of unsaturated silicon bonds after reactive plasma treatment based on OH groups typically used in conventional process strategies. Saturation of the unsaturated bonds can be accomplished by directly initiating a chemical reaction with a suitable organic species, thereby providing better reaction conditions, which in turn results in more efficient restoration of the dielectric properties. |
| priorityDate |
2011-09-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |