Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a2bcaf91101a370a3d64e3190366357f |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-51 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-84 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L1-148 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L9-0073 |
classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y10-00 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-772 |
filingDate |
2011-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fb4531a77f1d5bd3e5dcbcc97ab2b5ea http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e68e3eab4b7ae635658d579acf173013 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f3409e6a2672c52f7dd5ad99acb2cdc6 |
publicationDate |
2013-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
DE-102011089261-A1 |
titleOfInvention |
Transistor structure, method for producing a transistor structure, force measuring system |
abstract |
A transistor structure comprises a first connection region, a second connection region and an intermediate channel region in a semiconductor substrate. Furthermore, the transistor structure comprises a control electrode assigned to the channel region, wherein the control electrode has a control electrode section that is elastically deflectable under a force effect and is spaced from the channel region. The distance between the control electrode portion and the channel region is changed based on the force. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102022110093-B3 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/AT-519846-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/AT-519846-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102016114372-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102016114372-B4 |
priorityDate |
2011-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |