http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102011085599-B3
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e7aada2bb11143072d2540936223acad |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01H9-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B2290-45 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B2290-70 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02028 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B9-02 |
| filingDate | 2011-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2012-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3cccafec393b51955ff72e3abe66f59b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_147679344c7af59db6e59ef852f1c55c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3403ea5e713d44f71d5caa69fe9f02bd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bc2922b635c0c6be6ed6fb8910fb933a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8fa403bfe86b8ad55386baa9c77c506c |
| publicationDate | 2012-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DE-102011085599-B3 |
| titleOfInvention | Apparatus and method for interferometric measurement of an object |
| abstract | The invention relates to a device for the interferometric measurement of an object, comprising a radiation source for generating an output beam, a beam splitter device for splitting the output beam into a measurement beam and a first reference beam, an optical superimposition device and a first detector, the superimposition device and the first detector being designed to work together in this way are that the measurement beam at least partially reflected by the object and the first reference beam are superimposed on at least one detector surface of the first detector. The invention is characterized in that the beam splitter device is designed to split the output beam into a measuring beam, a first reference beam and at least one second reference beam, that the device has at least one second detector, and the superimposition device and the second detector are designed to work together in such a way that that of the Object at least partially scattered measuring beam and the second reference beam are superimposed on at least one detector surface of the second detector. The invention further relates to a method for the interferometric measurement of an object. |
| priorityDate | 2011-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.