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publicationDate 2012-06-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber DE-102010053214-A1
titleOfInvention Process for the hydrogen passivation of semiconductor layers
abstract The present invention relates to a method for the hydrogen passivation of semiconductor layers, in which the passivation takes place by using an arc plasma source, the passivated semiconductor layers produced by the method and their use.
priorityDate 2010-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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